发明名称 |
BACK-THINNED RADIATION DETECTOR WITH 3D ACTIVE REGION AND CORRESPONDING METHODS OF MANUFACTURING AND USE |
摘要 |
<p>A radiation detector is disclosed. The detector has an entrance opening etched through a low-resistivity volume of silicon, a sensitive volume of high-resistivity silicon for converting the radiation particles into detectable charges, and a passivation layer between the low and high-resistivity silicon layers. The detector also has electrodes built in the form of vertical channels for collecting the charges generated in the sensitive volume, and read-out electronics for generating signals based on the collected charges.</p> |
申请公布号 |
EP2227828(A2) |
申请公布日期 |
2010.09.15 |
申请号 |
EP20080858023 |
申请日期 |
2008.12.03 |
申请人 |
TEKNOFLOW OY;CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS (CSIC) |
发明人 |
GARCIA, FRANCISCO;ORAVA, RISTO;LOZANO, MANUEL;PELLEGRINI, GIULIO |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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