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发明名称
摘要
申请公布号	JP4546095(B2)	申请公布日期	2010.09.15
申请号	JP20030585160	申请日期	2003.02.04
申请人		发明人
分类号	C23C16/455;H01L21/02;C23C14/50;C23C16/458;C30B25/12;H01L21/00;H01L21/205;H01L21/683	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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