发明名称 Method for monitoring plasma discharges
摘要 The method involves detecting a measuring signal, which represents a measuring variable (I) for the electrical energy generated by the alternating current in the medium. The signal components of the measuring signal are separated, which lie above an allowed frequency. The separated signal components of the measuring signal are evaluated by comparing with an allowed reference. An independent claim is also included for a device for monitoring of plasma discharge during a surface treatment process.
申请公布号 EP2228818(A2) 申请公布日期 2010.09.15
申请号 EP20100155304 申请日期 2010.03.03
申请人 SCHOTT AG 发明人 BAUCH, HARTMUT;BICKER, MATTHIAS
分类号 H01J37/32 主分类号 H01J37/32
代理机构 代理人
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