| 摘要 |
PURPOSE: A multiplex frequency driven capacitively coupled plasma reactor is provided to generate plasma on a large area by driving a plurality of capacitively coupled plasma according to multi-frequency. CONSTITUTION: A capacitively coupled plasma reactor includes a plasma reactor(10), a capacitively coupled electrode assembly(30), and two or more main power sources(40a, 40b). The capacitively coupled electrode assembly includes a plurality of capacitively coupled electrodes(31, 33) in order to discharge of plasma in the plasma reactor. The main power sources drive the capacitively coupled electrodes by supplying two or more different wireless frequency power to the capacitively coupled electrode assembly.
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