LIFT PIN AND APPARATUS FOR PROCESSING A WAFER INCLUDING THE SAME

摘要

PURPOSE: A lift pin and an apparatus for processing a wafer including the same are provided to prevent the scratch defect of a wafer caused by a lift pin by including a supporting unit of a lift pin for supporting the wafer made of material having lower hardness than the silicon which constitutes the wafer. CONSTITUTION: A body part(610) is inserted into a penetration hole of a susceptor in vertical direction in order to be transferable. The body part comprises an inserting hole(612) on the upper side. A supporting part(620) supports a wafer(W). The supporting part is inserted into the insertion hole from the upper side of the body part.