发明名称
摘要 It is made possible to restrict warpage at the time of resin cure and achieve a smaller thickness. A semiconductor device includes: a first chip including a MEMS device and a first pad formed on an upper face of the MEMS device, the first pad being electrically connected to the MEMS device; a second chip including a semiconductor device and a second pad formed on an upper face of the semiconductor device, the second pad being electrically connected to the semiconductor device; and an adhesive portion having a stacked structure, and bonding a side face of the first chip and a side face of the second chip, the stacked structure including a first adhesive film formed by adding a first material constant modifier to a first resin, and a second adhesive film formed by adding a second material constant modifier to a second resin.
申请公布号 JP4543089(B2) 申请公布日期 2010.09.15
申请号 JP20080004100 申请日期 2008.01.11
申请人 发明人
分类号 H01L25/16;H01L23/29;H01L23/31 主分类号 H01L25/16
代理机构 代理人
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