| 摘要 |
PURPOSE: A substrate processing apparatus, a method for reproducing a filtering material, and a storing media are provided to improve the rate of operations by omitting a filtering material replacing operation. CONSTITUTION: A dry gas generating unit(23) heats fluid to obtain a gas for a dry operation. The dry gas generating unit includes a temperature control function. A filtering material(222) eliminates particles in the gas for the dry operation. A filtering material heating unit(234) heats the filtering material. A processing unit implements the dry operation using the gas for the dry operation. A controlling unit controls the temperature for heating the filtering material heating unit.
|
