| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for controlling a power source for a discharge reactor capable of applying appropriate voltage according to a discharge condition in the discharge reactor. <P>SOLUTION: In the method for controlling the power source 12 for the discharge reactor, impedance of the discharge reactor R is calculated based on voltage 14 applied to the discharge reactor R and current 16 flowing in the discharge reactor R, and voltage applied to the discharge reactor is changed to control the impedance to a predetermined impedance. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
