发明名称 TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING THE SAME
摘要 A transparent conductive film of the present invention is a film containing magnesium, at least one element (A) selected from the group consisting of carbon, silicon and boron, oxygen, and hydrogen. For example, this transparent conductive film may be manufactured by forming a film containing magnesium and an element (A) on a substrate and holding the film in an atmosphere containing water, which forming uses a target containing magnesium and a target containing the element (A) being at least one selected from the group consisting of carbon, silicon and boron.
申请公布号 EP2228805(A1) 申请公布日期 2010.09.15
申请号 EP20080840743 申请日期 2008.10.10
申请人 TOKAI UNIVERSITY EDUCATIONAL SYSTEM;AISEKKU NANO TYUBU CO., LTD. 发明人 KUJI, TOSHIRO;CHIBA, MASAFUMI;HONJO, TAKAMITSU;KOTODA, KOICHIRO
分类号 H01B5/14;C23C14/06;C23C14/34;C23C14/58;H01B13/00 主分类号 H01B5/14
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