A MICRO INFRARED RAY EMITTING SOURCE AND A METHOD FOR MANURATURING THE SAME

摘要

PURPOSE: A micro infrared ray generation source and a manufacturing method thereof are provided to prevent the heat stress in the middle of the heater by offering the heat metal part near the middle of the heater. CONSTITUTION: A low strain film(120) is formed on the top surface and the bottom surface of a semiconductor substrate(110). A heater(130) is formed in the middle of the low strain film of the top surface of the semiconductor substrate. First and second electrode parts(140, 140') are formed on the surface of the semiconductor substrate.