发明名称 |
Semiconductor devices having Fin-type active areas and methods of manufacturing the same |
摘要 |
A semiconductor device having a fin type active area includes a plurality of active regions, a first device isolation layer and a recessed second device isolation layer disposed in a direction of gate electrodes of the semiconductor device. A recessed second device isolation layer and a first device isolation layer are disposed in a vertical direction of the gate electrodes. The first device isolation layer and the plurality of active regions are alternately disposed in a first direction of the plurality of active regions.
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申请公布号 |
US7795099(B2) |
申请公布日期 |
2010.09.14 |
申请号 |
US20070979748 |
申请日期 |
2007.11.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KANG HYUN-JAE;LEE JI-YOUNG;CHO HAN-KU;YEO GI-SUNG |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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