发明名称 Fine mold and method for regenerating fine mold
摘要 A fine mold comprises a regeneration target film forming a convex part of a formation surface, and a light shielding unit that is configured deeper than a bottom of the formation surface and that regenerates the regeneration target film. A manufacturing cost of a product having a three-dimensional structure can be reduced.
申请公布号 US7794225(B2) 申请公布日期 2010.09.14
申请号 US20070860182 申请日期 2007.09.24
申请人 YAMAHA CORPORATION 发明人 HATTORI ATSUO
分类号 B29C59/00;B29C33/40;B29C59/02;B81B1/00;B81C99/00;G02B3/00;G02B5/18;G03F7/26;G11B7/26;H01L21/027 主分类号 B29C59/00
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