摘要 |
The carrier base 3 is movably installed at the upper part of the FOUP opener main body 50b, and the clamping base 4 is movably installed at the upper part of the carrier base 3. The clamp lever 5a is rotatably supported by the rotating shaft 5c at the upper part of the clamping base 4, and the clamping pawl 5b is formed on the clamp lever 5a. The carrier base 3 and the FOUP 2 integrally move. The clamping pawl 5b, which is accommodated into the clamping recess 2h, presses the clamped portion 2c from above to below, by which the FOUP 2 is fixed to the mounting base 51.
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