| 摘要 |
A capacitive physical quantity detection device comprising a plurality of capacitive physical quantity sensors, wherein each sensor includes: a detection unit having a movable electrode and a fixed electrode; a C-V conversion circuit having a differential amplifier circuit, wherein a first input terminal of the differential amplifier circuit is coupled with the movable electrode, a second input terminal of the differential amplifier circuit inputs a reference voltage and a self-diagnosis voltage therein during a normal operation and a self-diagnosis operation, respectively, and the C-V conversion circuit outputs an output voltage; and a signal processing circuit that performs a signal processing of the output voltage, wherein the reference voltage in each sensor is substantially the same, the plurality of sensors performs the self-diagnosis operation simultaneously, and the self-diagnosis voltage in one of the sensors is a first self-diagnosis voltage that is different in magnitude from the self-diagnosis voltage in another one of the sensors.
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