发明名称 Method of forming a split gate memory device and apparatus
摘要 A split-gate memory device has a select gate having a first work function overlying a first portion of a substrate. A control gate having a second work function overlies a second portion of the substrate proximate the first portion. When the majority carriers of the split-gate memory device are electrons, the first work function is greater than the second work function. When the majority carriers of the split-gate memory device are holes, the first work function is less than the second work function. First and second current electrodes in the substrate are separated by a channel that underlies the control gate and select gate. The differing work functions of the control gate and the select gate result in differing threshold voltages for each gate to optimize device performance. For an N-channel device, the select gate is P conductivity and the control gate is N conductivity.
申请公布号 US7795091(B2) 申请公布日期 2010.09.14
申请号 US20080112664 申请日期 2008.04.30
申请人 WINSTEAD BRIAN A;RAO RAJESH A;WILLIAMS SPENCER E 发明人 WINSTEAD BRIAN A.;RAO RAJESH A.;WILLIAMS SPENCER E.
分类号 H01L21/336 主分类号 H01L21/336
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