发明名称 DRAM device and method of manufacturing the same
摘要 In a DRAM device and a method of manufacturing the same, a multiple tunnel junction (MTJ) structure is provided, which includes conductive patterns and nonconductive patterns alternately stacked on each other. The nonconductive patterns have a band gap larger than a band gap of the conductive patterns. A gate insulation layer and a gate electrode are formed on a sidewall of the MTJ structure. A word line is connected with the MTJ structure, and a bit line is connected with one of top and bottom surfaces of the MTJ structure. A capacitor is connected with one of top and bottom surfaces of the MTJ structure that is not connected with the bit line. Current leakage in the DRAM device is reduced and a unit cells may be vertically stacked on the substrate, so a smaller surface area of the substrate is required for the DRAM device.
申请公布号 US7795659(B2) 申请公布日期 2010.09.14
申请号 US20080149406 申请日期 2008.05.01
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOON HONG-SIK;YEO IN-SEOK;BAIK SEUNG-JAE;HUO ZONG-LIANG;KIM SHI-EUN
分类号 H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L27/108
代理机构 代理人
主权项
地址