| 摘要 |
A metal evaporation boat having improved wettability to a molten metal and having a prolonged life, and a method for evaporating a metal employing it. A metal evaporation heating element characterized by having one or more grooves in a direction not in parallel with a current direction, on an upper surface of a ceramic sintered body comprising titanium diboride (TiB 2 ) and/or zirconium diboride (ZrB 2 ), and boron nitride (BN). It is preferred that the direction not in parallel with the current collection is from 20 to 160°C to the current direction, that the ceramic sintered body has a cavity and the groove is formed on the bottom surface thereof, and that a predetermined pattern is drawn by a plurality of grooves on the upper surface of the ceramic sintered body and/or on the upper surface of the cavity. In addition, a method for evaporating a metal characterized by using the metal evaporation heating element and heating a metal in vacuum in a state where part or whole of the groove is in contact with the metal. |
