SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

摘要

PURPOSE: A device and a method for transferring a substrate are provided to improve the throughput of a substrate processing system by reducing a transfer time of a substrate between a processing device and a substrate receiving unit. CONSTITUTION: A first substrate receiver(50) receives a plurality of substrates(W) inputted to a processing device(22) in a vertical direction with multi-stages. A second substrate receiver(51) receives a plurality of substrates outputted from the processing device in the vertical direction with multi-stages. A first substrate holder(56) transfers the substrate from the first substrate receiver to the processing device. A second substrate holder(57) transfers the substrate from the processing device to the second substrate receiver. A first lifting unit(42a) transfers the substrate between the first substrate receiver and the first substrate holder by vertically moving the first substrate holder and the substrate in the first substrate receiver. A second lifting unit(42b) transfers the substrate between the second substrate receiver and the second substrate holder by vertically moving the second substrate holder and the substrate in the second substrate receiver.