| 摘要 |
PURPOSE: An arc ion plating system is provided to load work pieces into a vacuum chamber stably without collision and thereby prevent damage to the work pieces. CONSTITUTION: An arc ion plating system comprises an entry rail(110), a support rail(120), a transfer rail(130), one or more loading rails(140), a second cylinder(150), a loading table, and a third cylinder(170). The entry rail is installed in front of a door(11). A first cylinder(121) is connected in the longitudinal direction on a side of the support rail. The transfer rail is installed on the top of the support rail and moves lengthwise. The loading rail moves in the width direction of the transfer rail. The second cylinder transfers the loading rail back and forth. A holder(30) is attached to and detached from the loading table. The third cylinder transfers the loading table toward the inside of a vacuum chamber(10).
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