| 摘要 |
PURPOSE: A reacting apparatus is provided to prevent the deposition of reactant on the inner side of a tube main body by including a buffer part between the reactant and the tube main body. CONSTITUTION: A tube furnace uniformly heats reactant(30) which is contained in a crucible(200). A tube main body(110) contains the reactant. A buffer part(120) is arranged between the reactant and the tube main body. Hear source(130) is arranged on the external side of the tube main body and heats the reactant. The inner circumference of the tube main body contacts with the external circumference of the buffer part.
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