发明名称 HEAT AND COOLING OF GAS SCRUBBER
摘要 PURPOSE: An indirect cooling and heating type gas processing apparatus is provided to ensure the heating performance of a heating part by preventing damages due to gas and heat from a combustion chamber. CONSTITUTION: A heating unit(210) is installed in a cylindrical outer case(100). A gas supplying pipe(10) and an air supplying pipe(340) are connected with the upper side of a combustion chamber(200). An air supplying unit(300) supplies air in the combustion chamber. The air supplying unit is composed of a chamber(320) and a chamber heating part(310). Air heated in the air supplying unit is supplied into the combustion chamber through the air supplying pipe.
申请公布号 KR20100099418(A) 申请公布日期 2010.09.13
申请号 KR20090017910 申请日期 2009.03.03
申请人 WAVESQUARE INC. 发明人 CHO, MEONG WHAN;KIM, BYUNG YONG
分类号 H01L21/02 主分类号 H01L21/02
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