METHOD OF WORKING THIN LAYER ON WORK AND THIN LAYOR WORKING APPARATUS

摘要

[Object]To improve quality of work, a laser beam working point is maintained at a constant level. [Means of achieving the object] An apparatus for working a work (101) having a thin layer disposed on a transparent glass comprises a work support (4) that vertically support a bottom surface of the work (101) by means of pressurized air, a clamping means (6) capable of vertically moving to follow vertical deflection of the work (101) and a working head (A4) capable of working the thin layer by means of a laser. The working head (A4) directs a laser beam from the bottom surface of the work (101) to work the thin layer disposed on the upper surface of the work (101). The head is further provided with nozzles capable of emitting cooling medium from the side where the laser beam emitted from the working head (A4) reaches the thin layer (upper surface), thereby enabling working the thin layer while applying cooling medium.