FLUID CONTROLLER

摘要

Provided is a fluid controller which has a reduced cost and requires a reduced space. A fluid controller (1) has a fluid control section (2) and a fluid introducing section (3). The fluid introducing section (3) is separated into three sections, and is composed of first and second shutting/opening sections (5, 6) on the inlet side, each of which is arranged on the inlet side and is composed of 2×N/2 number of open/close valves (23), and a shutting/opening section (7) on the fluid control section side, which is composed of 4×M number of open/close valves (23) and is arranged between the first and second shutting/opening sections (5, 6) on the inlet side and the fluid control section (2).