| 摘要 |
Improved environmental control system for improved nanolithography, imaging, detecting, and fabricating. An article comprising: at least one environmental chamber; at least one conditioning chamber adapted to be in gaseous communication with the environmental chamber, wherein the conditioning chamber comprises at least one gas transport device such as a fan, optionally at least one temperature probe, and at least one heating-cooling device such as a thermoelectric device which in operation provides a cold side and a hot side, at least one water vapor source, and at least one temperature sensor, at least one humidity sensor, wherein the fan, the thermoelectric device, the water vapor source, the temperature sensor, and the humidity sensor are adapted for a temperature controlled and humidity controlled gaseous flow. Two fans can be used, wherein the fans can transport air in the same direction or in opposite directions.
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