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发明名称
FEEDSTOCK SUPPLY UNIT AND VAPOR DEPOSITION EQUIPMENT
摘要
申请公布号
KR100981474(B1)
申请公布日期
2010.09.10
申请号
KR20087007720
申请日期
2006.12.20
申请人
发明人
分类号
C23C16/448;C23C16/455
主分类号
C23C16/448
代理机构
代理人
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地址
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