MULTILAYER STRUCTURE HAVING SEMICONDUCTOR LAYER AND LAYER-THICKNESS MEASUREMENT REGION, AND THIN-FILM PHOTOELECTRIC CONVERSION DEVICE AND INTEGRATED THIN-FILM SOLAR CELL UNIT USING SAME

摘要

A multilayer structure provided with a base having an unlevel surface and a semiconductor layer stacked on the base surface; wherein a portion of the base has a layer-thickness measurement region where the layer thickness of the semiconductor layer is optically measured; and the layer-thickness measurement region is provided with a reduced-surface-roughness region having surface roughness that is smaller than the surface roughness of the unlevel surface.