发明名称 |
SURFACE PLASMON RESONANCE SENSOR USING BEAM PROFILE ELLIPSOMETRY |
摘要 |
Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected. |
申请公布号 |
WO2010062150(A3) |
申请公布日期 |
2010.09.10 |
申请号 |
WO2009KR07084 |
申请日期 |
2009.11.30 |
申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE;CHO, HYUN MO;CHO, YONG JAI;CHEGAL, WON |
发明人 |
CHO, HYUN MO;CHO, YONG JAI;CHEGAL, WON |
分类号 |
G01N21/55;G01N21/00;G01N21/25 |
主分类号 |
G01N21/55 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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