发明名称 LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS
摘要 The technology disclosed relates to methods and devices that compensate for displacements in a pattern or deformations of workpiece. In particular, that relates to using timing to compensate for displacements along a first axis along the scanning direction while using resampling, interpolation or a similar method to compensate for displacements along a second access that is substantially orthogonal to the first access. The scanning direction may be an actual direction of movement of the scanning head or it may be a direction perpendicular to an orientation of an image projected onto a workpiece.
申请公布号 WO2010100268(A2) 申请公布日期 2010.09.10
申请号 WO2010EP52860 申请日期 2010.03.05
申请人 MICRONIC LASER SYSTEMS AB;SANDSTROEM, TORBJOERN 发明人 SANDSTROEM, TORBJOERN
分类号 G03F7/20 主分类号 G03F7/20
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