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发明名称
PROCEDE ET DISPOSITIF DE REGLAGE DE LA POSITION DE DEPOT D'UNE PLAQUETTE DE SEMI-CONDUCTEUR DANS UN FOUR
摘要
申请公布号
FR2934083(B1)
申请公布日期
2010.09.10
申请号
FR20080004063
申请日期
2008.07.17
申请人
STMICROELECTRONICS ROUSSET SAS
发明人
TURLURE SEBASTIEN
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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