| 摘要 |
The invention presents a micro-mechanical resonator, comprising two masses coupled in the direction of a common axis by a spring structure such, that the spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. The invention also relates to a micro-mechanical resonator matrix, a sensor and a navigation device. |
