MANUFACTURING METHOD OF TRANSPARENT CONDUCTIVE LAMINATE, THE TRANSPARENT CONDUCTIVE LAMINATE, AND TOUCH PANEL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a transparent conductive laminate in which the transparent conductive laminate having a high surface resistance value and high reliability can be manufactured.

SOLUTION: In the manufacturing method of the transparent conductive laminate, a transparent conductive layer 12 is formed on a transparent base material film 11. In a mixture gas containing sputtering gas and oxygen gas, a transparent conductive layer forming step of forming the transparent conductive layer 12 on the transparent base material film 11 is carried out by a sputtering method by using a target containing In2O3and SnO2. The target furthermore contains a third component; a content ratio of SnO2to the total content ratio of In2O3and SnO2in the target is in a range of 20 to 45 wt.%; and the mixture ratio of oxygen gas to the mixture gas is in a range of 1 to 5 vol.%.

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