| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silane compound containing a quinolone group that can introduce a photodegradable quinolone group having high sensitivity to an i beam onto the surface of a substrate, and a surface modifier containing the silane compound. Ž<P>SOLUTION: The silane compound containing a quinolone group is represented by formula (1) [wherein R<SP>1</SP>-R<SP>6</SP>are H, halogen or OR<SP>7</SP>(R<SP>7</SP>is an alkyl group or the like); X is -O-, -COO-, -SO<SB>3</SB>- or -NHCOO-; L is 0 or 1; Y is -CH<SB>2</SB>-, -O-, -OCO- or -COO-; m is 2-20; R<SP>8</SP>-R<SP>10</SP>are a 1-3C alkyl group or the like, not all of R<SP>8</SP>-R<SP>10</SP>are a 1-3C alkyl group]. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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