| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor which detects pressure optically, and a method of pressure measurement of the pressure sensor. Ž<P>SOLUTION: The optical pressure sensor 1 includes a transparent substrate 13, a pressure receiving plate 80 which is provided opposite to the transparent substrate 13 and includes a low reflection area 81 and a high reflection area on the side opposite to the transparent substrate 13, elastic support parts 61-64 which are provided between the transparent substrate 13 and the pressure receiving plate 80 and vary a distance between the transparent substrate 13 and the pressure receiving plate 80 when a force is made to act on the pressure receiving plate 80, and a plurality of light receiving elements 20 which are provided on the transparent substrate 13 respectively at positions to which the low reflection area 81 and the high reflection area of the pressure receiving plate 80 are opposed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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