| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-purity trialkyl gallium using a simple method, and a method of producing the same. SOLUTION: The high-purity trialkyl gallium of a total hydrocarbon content of lower than 4 mass ppm and of a content of silicon atoms of 0.05 mass ppm or lower can be obtained as a main fraction by reacting a trialkyl aluminum with a trihalogenogallium while causing them to reflux, and subsequently distilling the reaction product at a suitable reflux ratio. COPYRIGHT: (C)2010,JPO&INPIT |
