| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having high acceleration detection accuracy and excelling in productivity, and a method of manufacturing an acceleration sensor. <P>SOLUTION: This acceleration sensor includes a sensor element 20 and a substrate 1 for mounting the sensor element 20 thereon. The sensor element 20 comprises: a fixed part 13; an overlap 11 displaceable relative to the fixed part 13; a beam 12 bending in keeping with the displacement of the overlap 11 with one end thereof joined to the fixed part 13 and the other end joined to the overlap 11, respectively; and a resistance element 15 provided on the beam 12 with the resistance value changing in keeping with the bending of the beam 12. Steps 3 are provided on a surface of the substrate 1 on its side where the sensor element 20 is mounted while cut-outs 16 fitting with the steps 3 are provided in the fixed part 13 of the sensor element 20. <P>COPYRIGHT: (C)2010,JPO&INPIT |
