| 摘要 |
PROBLEM TO BE SOLVED: To automatically and accurately obtain the offset amount of a probe pin by an installation of a lower cost. SOLUTION: On a circuit board inspection device, X-Y coordinates with its original point being O are set to dispose four sensor electrodes on the X and Y axes so as to be severally equidistant from the original point O. After moving the probe pin 10 to the original point O based on original-point coordinate data, the values of capacitance arising between the probe pin 10 and the sensor electrodes are measured, respectively. A specific quadrant where the probe pin 10 exists is narrowed down from a first capacitance value C1 which is the largest in capacitance value and a second capacitance value C2 which is the second largest. The distance r1 between a sensor electrode SX1 and the probe pin 10 is found from the capacitance value C1 to set up an equation (1) of a first circle while the distance r2 between a sensor electrode SY1 and the probe pin 10 is found from the capacitance value C2 to set up an equation (2) of a second circle. The coordinates of intersecting points of the first and second circles are found from the equations (1) and (2) to obtain the offset amount of the probe pin 10 relative to the original point O. COPYRIGHT: (C)2010,JPO&INPIT |
