| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus that prevents particles from being flown up due to a pressure gradient while suppressing a time needed for atmosphere release short. SOLUTION: When releasing a load lock chamber to an atmosphere by gas introduction from a feed pipe, the vacuum processing apparatus starts evacuating the load lock chamber using an exhaust pipe when the pressure in the load lock chamber rises up to predetermined first pressure, and stops the evacuation using the exhaust pipe when the pressure in the load lock chamber rises up to second pressure higher than the first pressure. COPYRIGHT: (C)2010,JPO&INPIT
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