发明名称 METAL SURFACE TREATING AGENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a metal surface treating agent for roughening a copper or copper alloy surface to a desired degree, being excellent in adhesiveness between a fine copper or copper alloy wiring and a photoresist (resin), and a method of treating a surface. Ž<P>SOLUTION: The metal surface treating agent contains hydrogen peroxide, an inorganic acid, an halide ion, and triazole or the like. In fine copper wiring, the adhesiveness between the copper wiring and the photoresist (resin), is excellent by roughening the copper or the copper alloy surface to the desired degree with the metal surface treating agent. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010196119(A) 申请公布日期 2010.09.09
申请号 JP20090042684 申请日期 2009.02.25
申请人 MITSUBISHI GAS CHEMICAL CO INC;HISHIE KAGAKU KK 发明人 TAKAHASHI KENICHI;IKEDA KAZUHIKO;ATAYA TOMOYUKI;NAITO YUKIHIDE
分类号 C23F1/18;H05K3/38 主分类号 C23F1/18
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