| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the sensitivity and accuracy of inertia force detection. <P>SOLUTION: An inertia force detecting element includes: weights 7; first arms 2 and second arms 3 which have flexibility and support the weights 7, have a specified thickness and are formed in the same plane, and are symmetrical in the thickness direction; a frame 6 for holding the weights 7 through the first arms 2 and the second arms 3; first driving electrodes 8 and second driving electrodes 9 for driving the weights 7, and sensing electrodes 10 for detecting inertia forces acting on the weights 7. The first arms 2 and the second arms 3 have portions thinner than the thickness of the weights 7, in the direction perpendicular to the plane where the first arms 2 and the second arms 3 are formed, and the weights 7 are symmetrical in the direction perpendicular to the plane where the first arms 2 and the second arms 3 are formed. <P>COPYRIGHT: (C)2010,JPO&INPIT |
