| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily perform screening, and to obtain a structure hardly destructible in a dicing process, concerning a measurement element wherein a resistor working as a heater is formed on a thin part which is thermally insulated from a semiconductor substrate by being provided in a hollow part formed in the semiconductor substrate. <P>SOLUTION: The measurement element includes the semiconductor substrate 2, an electric insulating film 3 formed on the semiconductor substrate 2, the resistor 4 constituting the heater formed on the electric insulating film 3, and a hollow 21 formed by removing a semiconductor substrate 2 part corresponding to a domain where a body part 4a of the resistor 4 is formed. In the measurement element wherein the thin part 11 is formed by the hollow 21 in the domain where the body part 4a of the resistor 4 is formed, and an opening 7 penetrating in the thickness direction of the thin part 11 is formed in a part of the thin part 11, a film 9 for covering a domain of the opening 7 is formed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
