| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform optical axis adjustment work for an object under inspection smoothly and with high precision in an interferometer. Ž<P>SOLUTION: The interferometer 1 includes: a collimator lens 5 for collecting a reference-surface reflective light beam L<SB>4</SB>and a surface-under-inspection reflective light beam L<SB>3</SB>; a half prism 17 for dividing the optical paths of the reference-surface reflective light beam L<SB>4</SB>and the surface-under-inspection reflective light beam L<SB>3</SB>into a first optical path P<SB>1</SB>and a second optical path P<SB>2</SB>; an interference fringes camera 12 for acquiring a first image signal by photoelectrically converting an image of interference fringes; a screen plate 18 having a pinhole 18a and a screen 18b; a spot camera 16 for acquiring a second image signal by photoelectrically converting an image of the screen plate 18; a light receiving element 19 for receiving a light beam passed through the pinhole 18a; a display unit 13 for displaying the image signals; and a signal selection unit 23 for selectively switching between the first and second image signals and supplying either one of them to the display unit 13 in accordance with the output value of the light receiving element 19. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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