| 摘要 |
The present invention relates to an apparatus (10) for aligning an optical device with an object. The apparatus comprises, a frame (12), a support unit (16) for supporting said optical device or said object and a transportation device (14) arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere (18, 22) is provided, which segment defines a spherical surface (20), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.
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