| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact purification device for purifying a large amount of nitrogen gas or rare gas by removing hydrogen, carbon monoxide, carbon dioxide, oxygen and water, to reduce the use amount of a catalyst such as expensive zirconium getter or nickel catalyst, and to reduce the purification cost. <P>SOLUTION: Nitrogen gas or rare gas is brought into contact with an adsorbent for moisture to remove water and to rectify the gas flow. The gas is then brought into contact with a hydrogen-reduced nickel catalyst to remove hydrogen, carbon monoxide and oxygen. The gas is further brought into contact with alumina to remove carbon dioxide, and the gas flow is rendered into a down flow at a flow rate of 31 to 100 cm/sec in terms of superficial velocity. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
