| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem that the efficiency of SHG conversion is deteriorated, which is caused by that the length of polarization inversion areas is different depending on the location of a waveguide in the conventional SHG element. SOLUTION: A method of manufacturing the SHG element includes: a first polarization inversion area formation step of forming a first polarization inversion area 25 on the first surface of a ferroelectric substrate 11; a joining step of sticking the first surface of the ferroelectric substrate to a support substrate 12; a polishing step of polishing the second surface of the ferroelectric substrate; and a second polarization inversion area formation step of forming a third electrode 20 including a comb electrode and a fourth electrode 21 facing the third electrode on a surface polished in the polishing step, and forming a second polarization inversion area 26 by applying a voltage between the third electrode and the fourth electrode, thus, the length of the polarization inversion area is uniformized in the waveguide, and the efficiency of conversion of the SHG element is improved. COPYRIGHT: (C)2010,JPO&INPIT |
