| 摘要 |
PROBLEM TO BE SOLVED: To facilitate peeling of an adhesive sheet at an early stage. SOLUTION: A sheet peeling device 10 includes: an irradiation means 12 for irradiating an energy ray to an energy ray curable adhesive sheet S which is adhered to a wafer W; a mask means 13 that partially coats the adhesive sheet S and is capable of forming a mask region MA, to which the energy ray from the irradiation means 12 is not irradiated, on the adhesive sheet S; an adhering means 19 for adhering a peeling tape PT to the adhesive sheet S; and a single axis robot 18 for relatively moving the peeling tape PT adhered to the adhesive sheet S with respect to the wafer W to peel the adhesive sheet S. The mask region MA is formed by the mask means 13 in a region located at an outer edge side of the wafer W and in which the peeling tape PT is adhered. COPYRIGHT: (C)2010,JPO&INPIT |
