| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical type displacement meter which enhances resolution without lowering a scanning speed of light. Ž<P>SOLUTION: In a high-resolution measurement mode, measurement is performed at positions P11-P15 in the direction X on a forward path F1 and performed at positions P11a-P15a in the direction X on a backward path B1, while it is performed at positions P11b-P15b in the direction X on a forward path F2 and performed at positions P11c-P15c in the direction X on a backward path B2. In the high-resolution measurement mode, in this way, the position of each measuring point in the direction X is so set as to be shifted according to changeover of the scanning direction of light. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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