发明名称 LASER BEAM MACHINING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To form the outer side of a laser-beam-machined groove in a vertical shape with respect to the machined surface of a workpiece without generating any ridge-shaped non-machined remainder in a center part in the width direction of the laser-beam-machined groove. <P>SOLUTION: A laser beam machining apparatus comprises: an elliptical beam forming means for forming the laser beam having a circular section oscillated from a laser beam oscillating means into the laser beam having an elliptical section; a first prism 552 which splits the laser beam whose section is formed into the elliptical shape by the elliptical beam forming means into first and second laser beams having the semi-elliptical section with the major axis of the ellipse of the laser beam as the axis of symmetry, and interchanges the right and left sides of the first and second laser beams; a second prism 553 for correcting the optical paths of the first and second laser beams split into two by the first prism; and a condensing lens 554 which condenses spots of the first and second laser beams with their optical paths corrected parallel to each other by the second prism with straight parts outside and arc-shaped parts inside, respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010194584(A) 申请公布日期 2010.09.09
申请号 JP20090042758 申请日期 2009.02.25
申请人 DISCO ABRASIVE SYST LTD 发明人 SAWABE DAIKI;OBA TATSUGO
分类号 B23K26/073;B23K26/00;B23K26/06;B23K26/067;H01L21/301 主分类号 B23K26/073
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