| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample supporting device having a lower profile and higher operability while avoiding the fly-apart of a ring spring which holds a sample on a charge particle beam device. SOLUTION: On a sample supporting bed 201, a sample pressing dovetail groove 202 is provided. A sample fixing mechanism part B includes the ring spring 203 for pressing a sample 207 in cooperation with the dovetail groove. The ring spring 203 includes a ring portion 203b for pressing the sample at its outer edge and two leg portions 203a extending from both ends of the ring portion. Via the two leg portions, the ring spring 203 is mounted on the sample supporting device so that it does not come off from the sample supporting bed 201 and is put in up-and-down turning motion when mounted/demounted in/from the dovetail groove. When the ring spring 203 is mounted/demounted in/from the dovetail groove 202, a slider 205 is used for slightly closing the spring leg portions 203a to make the diameter of the ring portion 203b shorter than that of the dovetail groove. COPYRIGHT: (C)2010,JPO&INPIT
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