| 摘要 |
<P>PROBLEM TO BE SOLVED: To sense sudden generation of a particle in a semiconductor process, and to prevent damage to operation of the process. <P>SOLUTION: This in-line particle sensor includes a sensor body, an illumination source, an illumination detector, and communication electronics. The sensor body has an electronics enclosure and a flow-through portion with a fluid inlet, a fluid outlet, a sample interaction region and a fluid passage extending through the sample interaction region from the fluid inlet to the fluid outlet. The illumination source is disposed to provide light through at least a portion of the sample interaction region. The illumination detector is disposed to detect illumination variation resulting from illumination impinging at least one particle in the flow passage in the sample interaction region. The communication electronics are operably coupled to the illumination detector to provide an indication of at least one particle sensed by the illumination detector. The sample interaction region is configured to withstand high operating pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT |
