| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a creeping discharge type plasma generating body and a plasma generating device generating plasma at low voltage and inhibiting corrosion of a surface electrode by plasma. <P>SOLUTION: This plasma generating device is a creeping discharge type plasma generating body including: an insulated substrate 1 made of ceramics; a first electrode 21 disposed on one main surface of the insulated substrate 1; and a second electrode 22 comprising an opposing region disposed on an inside or another main surface of the insulated substrate 1 and opposing to at least part of the first electrode 21, and an extending region extending to an outside of the first electrode 21 in a view from a direction perpendicular to one main surface of the insulated substrate 1. A circumference edge part of the first electrode 21 positioned at am inside of the second electrode 22 is covered by ceramic coating 4 in a view from a direction perpendicular to one main surface of the isolated substrate 1, and is formed in an irregular shape connecting to a boundary of the ceramic coating 4 and the first electrode 21 exposed from the ceramic coating 4. <P>COPYRIGHT: (C)2010,JPO&INPIT |
